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Posted: Jun 05, 2012

Kumho Petrochemical Joins SEMATECH's Resist Center at UAlbany NanoCollege for Advanced EUV Resist Development

(Nanowerk News) SEMATECH, a global consortium of chipmakers, announced today that Kumho Petrochemical, a Korea-based company that produces photoresist materials for semiconductor production, has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
The RMDC's mission is to enable resist suppliers to develop resist and materials for 22 nm patterning technologies and beyond, and the Center consists of both extreme ultraviolet (EUV) exposure capability and a portfolio of sponsored university research programs.
As a resist member of SEMATECH's lithography program, Kumho will team with SEMATECH engineers to accelerate the development of EUV materials and resists for use at the 22 nm node and beyond.
"We dream top the world electronic material industry, so we have tried hard to achieve it for last 10 years and have improved constantly. Starting from ArF photoresist, the sales have expanded in the fields of semiconductor and FPD chemicals. From now on, we will leap forward once again for development of the material for EUV lithography. In such a sense, we think that taking part in the SEMATECH program of EUV lithography will be very helpful to make our dream a reality," said Chang min Kim, Senior Vice President of Electronic Chemical Business Unit.
"We are pleased to welcome Kumho as a member, and we are confident this collaboration will help us build upon the excellent work that SEMATECH's lithography researchers have undertaken to drive the development of resist and materials that are critical for continued progress in manufacturing," said Stefan Wurm, director of Lithography, SEMATECH. "Partnering with resist suppliers such as Kumho will accelerate EUV resist development and, in turn, will support timely EUVL introduction."
"Driven by the vision and leadership of Governor Andrew Cuomo, the attraction of world-class companies to New York's rapidly expanding nanotechnology industry gains further momentum with the addition of Kumho at CNSE's Albany NanoTech Complex," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "This new collaboration further leverages the CNSE-SEMATECH partnership to enable leading-edge technologies for industry and critical economic opportunity for New York."
The partnership will be based on SEMATECH's extensive network of hardware and research expertise, semiconductor experience, and highly respected market leadership and on Kumho's transformational semiconductor patterning materials and processes. SEMATECH's RMDC will provide access to two micro-exposure tools (METs) as well as several metrology tools located at the College of Nanoscale Science and Engineering of the University at Albany and the University of California, Berkeley.
About Kumho Petrochemical
Kumho Petrochemical (KKPC) has strengthened its global leadership in the synthetic rubber industry via world's largest capacity of SBR and BR. KKPC focuses on synthetic rubbers, synthetic resins, specialty chemicals, electronic materials, building materials and energy as its core business. KKPC has developed chemical businesses and expanded its presence worldwide to satisfy customers timely for last 41 years. KKPC will innovate itself constantly to provide the best petrochemical solutions and customer focused services as trusted partner. KKPC closed 2011 by setting a new sales record of KRW 6,457 Billon and operation income of KRW 842 Billon based on IFRS. By 2020, KKPC aims to be a "Global Leading Chemical Group" with sales of KRW 20 trillion and 20 world- leading products. KKPC has been researching photoresist since 1989. We currently hold 65 of the 106 patents that were applied for and are recognized as the owner of the most advanced photoresist technology in Korea. Currently, the research workers at Kumho Electronic Chemical Business Unit are working continually to keep the research and commercialization of this technology on a par with advanced countries and retain our competitive edge. Information about Kumho Petrochemical can be found at www.kkpc.com.
About SEMATECH
SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, this year celebrates 25 years of excellence in accelerating the commercialization of technology innovations into manufacturing solutions. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org.
About CNSE
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world's most advanced university-driven research enterprise, offering students a one-of-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE's footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 2,700 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Novellus Systems. An expansion now underway, part of which will house the world's first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE's Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells. CNSE's Smart Systems Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse. For information, visit www.cnse.albany.edu.
Source: SEMATECH (press release)
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