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Posted: November 6, 2007

Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc.

(Nanowerk News) Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced that it had received a repeat order for a second Tegal 6500 Advanced Etch cluster tool from Skyworks Solutions, Inc. The system will be shipped to Skyworks’ fab in Southern California, where it will join the Tegal 6500 system already in place for etching SiN and other critical thin films on GaAs substrates. This repeat 6500 tool order supports Skyworks’ business expansion in the multimode and multimedia handset market, where Skyworks supports many of today’s leading handset manufacturers including LG, Motorola, Nokia, Samsung, and Sony Ericsson.
“Skyworks’ selection of the Tegal 6500 system for this repeat etch tool order is evidence of the high degree of confidence Skyworks has in Tegal’s technical capabilities and plasma etch process results,” said Scott Brown, Vice President, North American Sales, of Tegal Corporation. “It also demonstrates Tegal’s strong ongoing commitment to the compound semiconductor fabrication market for both plasma etch and for PVD applications, and Tegal’s strong commitment to our innovative customers, like Skyworks Solutions, in the compound semiconductor space.”
The Tegal 6500 etch system is a state-of the-art, high-vacuum cluster tool used in production fabs to etch a variety of thin films in an extremely clean process environment. Tegal 6500 Series tools are widely used in compound semiconductor, opto-electronic, non-volatile memory, and analog and power device fabrication, and in the fabrication of MEMS devices. The 6500 system has an easy-to-use GUI, SECS/GEM communication, and flexible wafer shape and size handling capabilities that makes it ideal for production applications on a variety of wafer substrates. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection, and active wafer temperature monitoring and control, are available to facilitate the etching of the many different dielectric and conductive films used in microelectronic device production.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.
About Tegal
Tegal provides process and equipment solutions to leading edge suppliers of compound semiconductor, magnetic data storage, advanced semiconductor, optoelectronic, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.
For more information about Tegal Corporation, visit: www.tegal.com
About Skyworks Solutions
Skyworks Solutions, Inc. is an innovator of high performance analog and mixed signal semiconductors enabling mobile connectivity. The company's power amplifiers, front-end modules and direct conversion radios are at the heart of many of today's leading-edge multimedia handsets. Leveraging core technologies, Skyworks also offers a diverse portfolio of linear products that support automotive, broadband, cellular infrastructure, industrial and medical applications. Headquartered in Woburn, Mass., Skyworks is worldwide with engineering, manufacturing, sales and service facilities throughout Asia, Europe and North America.
For more information about Skyworks Solutions, visit: www.skyworksinc.com
Source: Tegal