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Posted: November 28, 2007
University of Tuebingen Ready to Produce Carbon Nanotubes on AIXTRON CVD System
(Nanowerk News) AIXTRON AG announced the installation and commissioning of a Nanoinstruments Black Magic 2-inch R&D equipment for carbon nanotube (CNT) growth at the Physics and Chemistry Research Facility, University of Tuebingen, Germany. The new equipment combines both thermal CVD and plasma enhanced CVD in a single platform, and will be used for the development of carbon nanotube-based field effect transistors, vacuum electronic devices and sensor technology.
Prof Dieter Kern comments: "We are impressed by the ease-of-use and rapid processing times on the Black Magic system. The automated recipe feature will enable us to produce singlewall and multiwall CNT material in a reproducible and controllable way which is necessary for CNT integration with electronics. With added options for substrate biasing and liquid delivery, this system really is flexible for exploring CNT growth parameters and will allow us to push CNT technology."
The University of Tuebingen is another key account added to AIXTRON's nanotube and nanowire track record, which includes customers such as El-Mul Technologies, Harvard University, MIT, Nanoconduction, Portland State University, Singapore Polytechnic, UC San Diego and Yale University.
AIXTRON is a world leading supplier of Chemical Vapor Deposition (CVD), Atomic Vapor Deposition (AVD®) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry, with over 1,500 systems delivered to date. The recently established AIXTRONNanoinstruments business unit is focused on serving the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes (CNT) and other nanomaterials. CNT is a promising material for many future optical and electronic devices and applications and is currently investigated by many research groups as a promising material to be used in flat panel displays, heat sinks, integrated circuits, sensors or as electron guns.
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