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Posted: January 8, 2008

Santa Clara University receives AIXTRON's new CVD System for Carbon Nanotubes

(Nanowerk News) AIXTRON AG announced the successful installation of a 6-inch AIXTRON-Nanoinstruments CNT system at the Santa Clara University in California, USA. The new thermal CVD and plasma-enhanced CVD tool will be used for the development of carbon nanotube and nanofiber-based interconnects and thermal interface materials. The equipment has been installed at the University’s Center for Nanostructures (CNS) laboratory located in NASA Ames Research Center, Moffett Field, California.
Prof. Cary Yang, CNS Director, comments: “Our decision to go for the AIXTRON-Nanoinstruments equipment was supported by the fact that Nanoinstruments technology is already in use by several key players in CNT electronics, and it has a proven track record with its 6-inch reactors. We are confident that this system will enable us to grow carbon nanostructures with a high degree of uniformity, reproducibility, and controllability, which is essential for their incorporation in next-generation integrated circuits.”
AIXTRON is a world leading supplier of Chemical Vapour Deposition (CVD), Atomic Vapour Deposition (AVD) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry, with over 1,500 systems delivered to date. The recently established AIXTRON-Nanoinstruments business unit is focused on serving the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes (CNT) and other nanomaterials. AIXTRON’s nanotube and nanowire track record includes customers such as El-Mul Technologies, Harvard University, MIT, Nanoconduction, Portland State University, Singapore Polytechnic, UC San Diego, University of Tuebingen and Yale University.
Source: AIXTRON