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Posted: March 11, 2008
NanoTecCenter Weiz Selects EV Group Mask Aligner for Advanced R&D Facility Focused on Organic Electronics
(Nanowerk News) EV Group (EVG), a
leading supplier of wafer bonding and lithography equipment for the MEMS,
nanotechnology and semiconductor markets, today announced that Austrian
technology-research company NanoTecCenter Weiz Forschungsgesellschaft mbH
(NTC Weiz) has purchased an EVG620 precision alignment system for
installation in its new R&D facility focused on organic/plastic
electronics. NTC Weiz will use the EVG620 system to align and expose coated
organic substrates for advanced applications. This purchase, NTC Weiz's
first from EV Group, gives EVG further access to the latest developments in
the semiconductor and broader electronics markets while strengthening the
company's ties with the European research community.
According to Professor Emil List, scientific managing director at NTC
Weiz, "Our new R&D cleanroom will be focused on next-generation organic
semiconductor technology-one of the fastest-growing areas of the
electronics industry, and one with the greatest potential for yielding
paradigm-shifting products. To ensure the highest-quality results, we need
state-of-the-art equipment for this new line. Our competitive evaluation,
together with EVG's reputation for innovative yet reliable systems and
solutions, convinced us that they are the ideal partner for our latest
Its high throughput, tool flexibility and modular design have made the
EVG620 one of EV Group's most popular mask aligners, with a significant
number of installations at customer sites around the world. The precision
alignment system also allows for imprint processes with stamps and
substrates from small chip-size pieces to 6-inch (150 mm) wafers. EVG's
proprietary chuck design, which supports both soft and hard stamps,
provides uniform contact force for high-yield, large-area printing.
Configurations for nanotechnology applications can include release
mechanisms for stamps in addition to programmable high and low contact
force as well as in-situ fine alignment.
"As a leading R&D organization chartered with driving research efforts
in the nanotechnology arena, NTC Weiz is well positioned to utilize our
EVG620 mask aligner to maximum benefit," said Alois Malzer, product manager
for mask aligners at EVG. "The system's flexibility and extendibility
enable its use for a variety of applications, and we look forward to
playing an enabling role in NTC Weiz's organic semiconductor technology
research and development efforts."
About NanoTecCenter Weiz Forschungsgesellschaft mbH (NTC Weiz)
Founded in 2006, the NTC Weiz is a nonprofit research company located
in Weiz, Austria, funded 50 percent each by the Graz University of
Technology (http://www.tugraz.at) and JOANNEUM RESEARCH
Forschungsgesellschaft mbH (one of the largest non-university research
institutes in Austria, http://www.joanneum.at). NTC Weiz conducts research
and development work in the area of nanoscience and nanotechnology. In its
main R&D focus are the development and application of nanostructured
materials as well as the development of processes and devices in the fields
of optoelectronics, sensorics and nanoanalytics.
The activities range from mission oriented research, scientific
services, process and product development in cooperation with national and
international partners to technological coaching for large, medium-size and
The NTC Weiz operates a cleanroom with an area of 150 m2 and a gray
room of 145 m2, the latter also being easily expandable to a cleanroom. The
facilities integrate a modular pilot and demonstration fabrication line
including an inert glove box cluster for thin-film deposition both by
evaporation and by solution-processing, state-of-the-art, industrial inkjet
printers, a most-modern e-beam lithography, a photolithography cluster,
including the EVG620 precision alignment system, an integrated wet bench
for solution-based processing, an atomic force microscopy, various optical
microscopes, a well-equipped chemistry laboratory as well as
state-of-the-art lab equipment for the electrical characterization of
various devices under different conditions.
The NTC Weiz develops sensor and device concepts by combining profound
solid-state physics and advanced materials scientific know-how with
industrial scalable processing, characterization and device fabrication
experience. For more information, visit http://www.ntc-weiz.at.
About EV Group (EVG)
EV Group (EVG) is a world leader in wafer-processing solutions for
semiconductor, MEMS and nanotechnology applications. Through close
collaboration with its global customers, the company implements its
flexible manufacturing model to develop reliable, high-quality,
low-cost-of-ownership systems that are easily integrated into customers'
fab lines. Key products include wafer bonding, lithography/nanoimprint
lithography (NIL) and metrology equipment, as well as photoresist coaters,
cleaners and inspection systems.
In addition to its dominant share of the market for wafer bonders, EVG
holds a leading position in NIL and lithography for advanced packaging and
MEMS. Along these lines, the company co-founded the EMC-3D consortium in
2006 to create and help drive implementation of a cost-effective
through-silicon via (TSV) process for chip packaging and MEMS/sensors.
Other target semiconductor-related markets include silicon-on-insulator
(SOI), compound semiconductor and silicon-based power-device solutions.
Founded in 1980, EVG is headquartered in St. Florian, Austria, and
operates via a global customer support network, with subsidiaries in Tempe,
Ariz.; Albany, N.Y.; Yokohama and Fukuoka, Japan; and Chung-Li, Taiwan. The
company's vertical infrastructure allows EVG to respond quickly to new
technology developments, apply the technology to manufacturing challenges
and expedite device manufacturing in high volume. More information is
available at http://www.evgroup.com