The latest news from academia, regulators
research labs and other things of interest
Posted: August 18, 2008
Micronic Receives Order For A Sigma7500 From Asian Chipmaker
(Nanowerk News) Micronic Laser Systems AB (OMX Nordic Exchange Stockholm, Nordic list, Small Cap, Information Technology: MICR), today received an order for a Sigma7500 system from an Asian chipmaker. The system is scheduled for delivery during the current year.
”The semiconductor industry is increasing its efforts to reduce the cost of volume chip production, and Sigma has proven to be an effective solution for reducing photomask costs,” said Carl-Johan Blomberg, Micronic CFO. “We are very pleased to see that this customer has chosen Sigma following an extensive evaluation, and look forward to a continued collaboration as the system is put into production.”
The Sigma series covers an application space including both binary photomasks and phase shifting masks (PSM) at the 90nm, 65nm and 45nm technology nodes. In addition to meeting the stringent requirements for resolution and accuracy at these advanced technology nodes, the laser-based Sigma series provides productivity that is substantially higher than that of e-beam pattern generators. This lowers photomask manufacturing costs and turn-around time, thereby reducing the cost and time-to-market for ICs.
The high resolution and productivity are achieved with the system’s 248 nm excimer laser and Micronic’s proprietary spatial light modulator (SLM) technology. A massively parallel bitmap output results in short write times – only two to three hours for advanced masks – that are independent of the design density and optical proximity correction (OPC).
About Micronic Laser Systems AB
Micronic Laser Systems is a Swedish high-tech company engaged in the development, manufacture and marketing of a series of extremely accurate laser pattern generators for the production of photomasks. The technology involved is known as microlithography. Micronic´s product offering also includes metrology systems for display photomasks. Micronic´s systems are used by the world´s leading electronics companies in the manufacture of television and computer displays, semiconductor circuits and semiconductor packaging components. Micronic is located in Taby, north of Stockholm and at present has subsidiaries in the United States, Japan, South Korea and in Taiwan. Micronic maintains a web site at: http://www.micronic.se