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Posted: Aug 27, 2008

Aviza Continues to Expand Presence in Growing Deep Silicon Etch Market

(Nanowerk News) Aviza Technology, Inc., a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced multiple orders for its 200 mm and 300 mm Omega fxP etch systems and deep silicon (DSi) etch modules to three leading semiconductor manufacturers in Europe. The chipmakers will use the Omega DSi etch systems to manufacture IC devices for consumer, automotive and related end market applications.
The selection of an Omega fxP DSi etch system by one of the European customers was a result of an extensive competitive evaluation program. The rigorous evaluation process focused on Aviza's ability to meet the customer's criteria in four primary categories including, technology, production worthiness, cost and company strategy. After extensive marathon runs and testing, the data showed that Aviza's Omega fxP DSi system predominantly excelled in the areas of productivity and cost of ownership (CoO) advantages, which were the clear differentiators against the competition. The DSi etch system is currently installed at the company's facility, where it is being used for high aspect ratio DSi etching to manufacture IC devices for automotive applications. This customer has since placed a follow-on order for the same system configuration, which will be used for yet another application.
Additionally, Aviza has shipped further DSi etch modules to two other key European customers to support increased capacity for the manufacture of MEMS-based devices for automotive and consumer markets. Aviza continues to demonstrate world-class levels of expertise with its Omega fxP DSi system delivering high uptimes, reliability and process stability for high volume MEMS production. Aviza is well positioned to support customers' needs, as they scale their future MEMS manufacturing capacity. "As a manufacturing partner and a top tier supplier for DSi etch applications, we are dedicated to providing our customers with state-of-the-art process technologies on cost-effective systems coupled with a global service and support network in order to deliver the highest level of customer satisfaction," said Kevin Crofton, Senior Vice President, Product Business Units of Aviza Technology, Inc. "These most recent orders validate Aviza's position as a technology and market leader in DSi etch for high volume manufacturing."
About Omega fxP
s Omega fxP is a cluster system designed for high volume production that offers up to six process modules, combined with wafer alignment, cool-down and two vacuum cassette stations. The system provides high throughput for the high volume user or the option to "mix and match" different plasma sources so that advanced sequential etching processes can be addressed. Key applications for Omega include highly controlled Si trench etch plus metal and oxide etch for power devices, deep silicon etch and bulk silicon removal for MEMS and Wafer Level Packaging.
Source: Aviza Technologies (press release)
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