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Posted: October 8, 2008

Korea's National Information Society Agency Chooses STS' Pegasus for New MEMS Foundry

(Nanowerk News) Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have installed two VPX Pegasus cluster tools for the National Information Society Agency in Korea. These silicon etch tools will be used for deep reactive ion etching (DRIE) in a wide range of applications.
NIA is a project of the Korean government, which aims at realizing a ubiquitous sensor network (USN) society and fostering related industries. The term "USN" refers to a technology to integrate RFID tags and sensors, and to exchange and transmit information in real time via a sensor network.
The new Pegasus tools have been installed in the Songdo ubiquitous IT Cluster Center (u-ITC), which now offers MEMS foundry services, and is located in the Incheon Free Economic Zone in Korea. The u-ITC has been promoting research and development, standardization and dissemination of RFID and other related technologies since 2006. The MEMS sensor development conducted by the Center covers not only the sensors themselves, but also the integration of MEMS and CMOS, and buildup techniques.
Dr. Suh, USN Fab Director explained, "We chose STS' Pegasus DRIE systems because they offered the superior etch performance that you would expect from the acknowledged market-leaders, on a production-proven Brooks cluster platform."
Mr. Eizo Yasui, CEO of STS, "We are very happy with this latest installation of our Pegasus DRIE tools on cluster platforms. Approximately half of our Pegasus systems have been sold on production proven cluster platforms (the VPX & larger CPX), with STS ability and commitment to meet the demanding requirements of production customers demonstrated with each shipment."
About Surface Technology Systems plc
STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.
STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Company, a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd, currently markets in over 30 countries and has an installed base of over 900 systems.
For more information about STS please see
Source: The Peninsula
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