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Posted: October 14, 2008

Leading Lithography Supplier Receives Multiple-System Order for Advanced LED Manufacturing

(Nanowerk News) Ultratech, Inc., a leading supplier of lithography and laser-processing systems used to manufacture semiconductor devices, today announced it received a multiple-system order from U.S.-based SemiLEDs Corp. A leading supplier of high-brightness, laser-emitting diodes (HBLEDs), SemiLEDs will use Ultratech's Star 100 lithography tools for its white light, HBLED, high-power, UVC LED and other advanced lighting applications at its manufacturing facility in Hsinchu, Taiwan. Ultratech's advanced lithography expertise is enabling SemiLEDs to grow its position in this burgeoning market as the industry shifts from conventional lithography to projection stepper lithography technology for advanced LED production.
SemiLEDs Corporation Chairman and CEO Trung Tri Doan explained, "With improved alignment and resolution of the Star 100 Ultratech stepper system, we will start volume production of our advanced UVA high-power LED product family (365nm/395nm/405nm), with output optical power as high as 350mW per mm2. This new family of UVC high-power LED products will enable new LED applications that could only be dreamed of -- polymer curing such as inkjet printers, sanitation, semiconductor processes, medical applications such as dental, cancer treatment, tanning, etc. The MvPLED blue product family has seen a 15 percent improvement in performance; the new class of SemiLEDs Solid State Lighting devices (SL-SSL) 120lumens/watt will help accelerate the adoption of solid-state lighting. We selected Ultratech's lithography steppers based on the tools' high reliability and low cost of ownership. In addition to being a leader in advanced lithography solutions, Ultratech combines technology expertise and outstanding customer service to support our LED manufacturing requirements. As a valued partner, Ultratech will continue to play an integral role as advanced LED device volumes grow, and we continue to expand our worldwide leadership position."
"While this multi-system order demonstrates our ability to provide lithography systems that enable greater economic value to emerging markets, it also reinforces Ultratech's focus on energy conservation," noted Ultratech Chairman and CEO Arthur W. Zafiropoulo. "Today, lighting utilizes approximately 20 percent of global energy. As a result, the industry is transitioning to HBLEDs, which have a long life and use only a fraction of energy compared to incandescent and fluorescent lighting. With energy conservation driving up demand, HBLED leaders such as SemiLEDs are increasingly turning to stepper-based projection lithography due to its cost and yield advantages. We look forward to furthering our relationship with SemiLEDs and delivering lithography solutions that advance our customers' competitive advantage in this growing market."
The Star 100
The Star 100 lithography system is used by the leading HBLED and laser diode manufacturers and is designed to be easily integrated into a broad range of fabs with varying equipment types and wafer sizes. The tool's resolution, depth of focus, proprietary alignment system, and substrate handling capability combine to provide high productivity, reliability, flexibility, and cost-of-ownership advantages critical for advanced and emerging markets as they move toward high-volume production.
About SemiLEDs
SemiLEDs Corporation is the only mass producer of metal-base LED chips in the world. It designs, develops, manufactures and sells high brightness light emitting diodes (HBLED) using proprietary technologies to enable high-performance, (120lumens/watt) and cost-effective, solid-state lighting solutions; it also manufactures UVA HBLED products (365nm, 395nm, 405nm) at optical power output up to 350mW per mm2. SemiLEDs is a U.S. corporation, with offices in Boise, Idaho and manufacturing operations in Hsinchu Science Park, Taiwan. For additional information, please visit
About Ultratech
Ultratech, Inc. designs, manufactures and markets photolithography and laser processing equipment. Founded in 1979, Ultratech is a market leader in gold and solder bump lithography, in addition to being a pioneer of laser processing. Its advanced-packaging lithography systems deliver strong cost-of-ownership, repeatability and throughput advantages, and are widely used worldwide in the fabrication of semiconductors and FPDs. Ultratech's advanced laser processing technology is designed to enhance yields, while enabling a cost-effective transfer to 65-nm and below production, and is being integrated into the manufacturing lines of leading-edge semiconductor manufacturers. Ultratech's home page on the World Wide Web is located at
Source: Ultratech (press release)
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