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Posted: February 18, 2009
IMEC to present latest breakthroughs in advanced semiconductor lithography research
(Nanowerk News) IMEC technologists will present their newest breakthroughs in advanced semiconductor lithography research and development at next week’s SPIE (www.spie.org) Advanced Microlithography Conference, to be held February 23 - 27 in San Jose, California.
IMEC will present a record 26 papers at the conference. The papers report progress realized by IMEC and its world-leading core partners on EUV and double patterning lithography targeting the sub-32nm node. The range of lithography challenges are covered, including materials, manufacturing process technology, metrology, inspection, process control, optical microlithography, design for manufacturing, and alternative lithographic processes.
“Stimulated by these record number of papers and with a concerted effort from all actors involved in double patterning and EUV lithography research, IMEC is determined to advance cost-effective double patterning towards the 32nm node and EUV full speed towards the (sub-)22nm node”, stated Kurt Ronse, Advanced Lithography Program Director of IMEC. “SPIE provides the prestigious forum for the industry’s technologists to share findings and move semiconductor manufacturing forward to accomplish this common service.
Kurt Ronse continued, “As technologists, our goal is to enable engineers and scientists to see their IC designs become reality through manufacturing. Through IMEC’s collaborative research, we have achieved many milestones to discuss with our international colleagues.”
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, offices in the US, China and Taiwan, and representatives in Japan. Its staff of more than 1650 people includes about 600 industrial residents and guest researchers.
IMEC’s More Moore research aims at semiconductor scaling towards sub-32nm nodes. With its More than Moore research, IMEC looks into technologies for nomadic embedded systems, wireless autonomous transducer solutions, biomedical electronics, photovoltaics, organic electronics and GaN power electronics.
IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network worldwide position IMEC as a key partner for shaping technologies for future systems.