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Posted: February 19, 2009
CVD Equipment Corporation Launches EasyTube CVD Systems for Solar and Energy
(Nanowerk News) CVD Equipment Corporation announces the introduction of a family of EasyTube™ Systems with a focus on Quality Control and Research & Development for next generation process development in the Solar and Energy fields aimed at reducing the global dependence on oil and gas. The EasyTube™ platform provides a framework of solutions that can be quickly and cost efficiently customized to a wide variety of thin film process requirements needed to accelerate the commercialization of next generation solar cell/modules and smart windows.
For example, our EasyTube™ 3000-SiQC systems have been sold to qualify Silicon precursor materials for the solar and semiconductor industry (EasyTube™ 3000 SiQC). These systems are used for quality control of the Chlorosilane precursors used to manufacture polycrystalline silicon rods. By using the same precursor to deposit an epitaxial film that is measured for purity, the purity of the Silicon precursor material can be determined. This quality control tool will help develop lower cost manufacturing methods for Polysilicon precursors being proposed to manufacture solar cells with only slightly reduced photovoltaic conversion efficiencies.
In addition, the EasyTube™ research systems are capable of other film depositions, for example Amorphous Silicon, Polysilicon, Silicon Nitride, High or Low temperature Silicon Dioxide, Silicon and Silicon-Germanium Epitaxial, Transparent Conductive Oxides (SnO2, ZnO, etc.), Sulfurization, Selenization, Rapid Thermal Annealing, POCl3 and other related diffusion driven processes needed for next generation Silicon and CIGS solar cell process optimization. The EasyTube™ system can be equipped with a wide variety of options, including a Loadlock, operation at high or low pressures, substrate rotation for deposition and composition uniformity, rapid heating and many others. The EasyTube™ process gas handling system accommodates pyrophoric, flammable, corrosive, toxic, solid and liquid source materials. Optional gas, liquid or solid source delivery and process gas exhaust treatment enable turn-key process solutions that save both time and money.
The highly successful EasyTube™ product line has been sold worldwide to Universities and Research Laboratories for applications in the Nanotechnology and Semiconductor Research Markets. The expanded EasyTube™ product line focuses on applications in the Solar and Energy industry to provide lower cost research and faster delivery to develop solar and energy related manufacturing processes.