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Posted: April 6, 2009
Dalian University of Technology acquires AIXTRON CCS MOCVD tool for LEDs research
(Nanowerk News) AIXTRON AG today announced that Dalian R&D Center of
Optoelectronic Technology at Dalian University of Technology (DUT), based in Dalian City in
P.R. China, has ordered one Close-Coupled Showerhead® (CCS) MOCVD system. To be
supplied in the 3x2 inch wafer configuration, it will be used for the R&D of ultra-highbrightness
(UHB) GaN LEDs and will be delivered in the second quarter of 2009.
Mr. Du Guotong, Professor and Director of the Dalian R&D Center of Optoelectronic
Technology comments: "We chose an AIXTRON system in part because we knew that the
Close Coupled Showerhead reactors have particular adaptability to nitride-based UHB-LED
process development. Other outstanding features include their excellent uniformity of growth
while at the same time being easy to operate and maintain. Plus we know we can always call
upon the local AIXTRON team for support. All things considered I am sure that this is the
best MOCVD tool for our R&D purposes and we look forward to its arrival and commissioning
later this year."
Dalian R&D Center of Optoelectronic Technology was co-constructed by Technology Bureau
of Dalian City and DUT. The directions of its research are semiconductor lighting,
semiconductor laser devices and high-density optical storage technology, fiber optic active,
passive components and modules, scientific research equipment for the optoelectronics
industry and solar cells.
Dalian University of Technology (DUT) is one of the key universities under the direct
leadership of the State Ministry of Education. Since its founding nearly six decades ago the
university has enjoyed a high reputation for its careful management and excellent study
environment. With the support of "the 985 Project" and "the 211 Project", bringing forth the
spirit of innovation, DUT is engaged in grasping the historic opportunity of rejuvenating an old
northeastern industrial base. Its plan is to carry out a talent-training strategy to build DUT into
a world-class, research-oriented university.