| Posted: Dec 7th, 2012 | |
New Range of Combination Deposition Systems for Nanomaterials Research |
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| (Nanowerk News) Henniker Scientific announce the release of a new range of multi-technique deposition systems for nano-materials research. | |
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| Deposition System with load lock option. | |
| The family of systems offer the flexibility of several techniques in a single chamber, each system in the range featuring a universal ‘quick-change’ source flange which can be configured for specific deposition techniques or combination of techniques including magnetron, thermal, e-beam or combination sources which provide a truly multi-technique, multi-deposition system ideal for both small scale production and R&D prototyping. | |
| In addition, each system configuration has a wealth of viewports and equipment ports for ancillary instruments such as ion sources for sample cleaning, thickness monitors and load lock entry. A comprehensive PC control and data acquisition system is available as an option and also allows ancillary techniques and devices to be fully integrated. | |
| Efficient water cooling and differentially pumped seals guarantee a base pressure of E-9 mbar which, together with sample manipulator options, provide the widest possible access to substrate conditions, including full 360 degree rotation with stage heating and cooling. www.henniker-scientific.com |
| Source: Henniker Scientific (press release) |
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