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Posted: Apr 09, 2013

SEMATECH and Intermolecular Partner to Accelerate EUV Lithography and Advanced Transistor Development

(Nanowerk News) In an effort that will accelerate commercialization of extreme ultraviolet (EUV) lithography technology and the development of next-generation transistors, SEMATECH announced today that Intermolecular, Inc. (NASDAQ: IMI) has joined SEMATECH’s Lithography and Front End Processes (FEP) programs. The companies have agreed to co-develop new methods to reduce overall cost of ownership (CoO) for Extreme UltraViolet (EUV) lithography, and to co-explore new materials, processes, and integration schemes for advanced logic integrated circuit technologies.
“There are technology gaps the industry needs to address to enable cost-effective insertion of EUV lithography at the 22 nm half-pitch,” said Stefan Wurm, SEMATECH’s director of Lithography. “SEMATECH is pleased to welcome Intermolecular as a partner. We will work together to accelerate the investigation and qualification of chemical formulations needed to establish a production-worthy EUV lithography technology.”
Intermolecular’s High Productivity Combinatorial (HPC™) platform provides disruptive research and development (R&D) capability that allows for prototyping and characterization of atomic-scale devices at rates 10-100 times faster than can be achieved with conventional approaches. Such methodologies and technologies will be used in both of the program collaborations.
“As semiconductor dimensions are scaled down further, contact resistance remains a critical issue,” said Tony Chiang, Chief Technology Officer, Intermolecular. “Our unique capabilities to accelerate R&D across leading-edge semiconductor processes and devices complement SEMATECH’s expertise in advanced CMOS test structures and process flows. We are pleased to join in this pre-competitive collaboration intended to accelerate the transfer of new technologies into industry.”
Intermolecular's mission is to improve R&D efficiency in the semiconductor and clean energy industries through collaborations that use its HPC platform.
About Intermolecular, Inc.
Intermolecular® has pioneered a proprietary approach to accelerate research and development, innovation, and time-to-market for the semiconductor and clean energy industries. The approach consists of its proprietary High Productivity Combinatorial (HPC™) platform, coupled with its multi-disciplinary team. Through paid Collaborative Development Programs (CDPs) with its customers, Intermolecular develops proprietary technology and intellectual property for its customers focused on advanced materials, processes, integration and device architectures. Founded in 2004, Intermolecular is based in San Jose, California. “Intermolecular” and the Intermolecular logo are registered trademarks; and “HPC” is a trademark of Intermolecular, Inc.; all rights reserved. Learn more at www.intermolecular.com.
About SEMATECH
For over 25 years, SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org. Twitter: www.twitter.com/sematech
Source: SEMATECH (press release)
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