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Beneq Strengthens its Position in the Plasma Enhanced ALD Equipment Market

Beneq, a company providing industrial and R+D equipment and technology for functional coatings, has further strengthened its position in the plasma enhanced Atomic Layer Deposition (PEALD) equipment market, by establishing a collaboration agreement with Dr. Arthur Sherman, the pioneer and key inventor of PEALD technology.

Sep 2nd, 2009

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