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Tegal Secures MEMS Tool Orders for DRIE and AlN PVD Systems

Tegal Corporation, an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received orders for a Tegal 110 DE/SE DRIE tool and for a TEGAL SMT AlN PVD system from two prominent research centers currently equipping state-of-the-art laboratory facilities.

Jun 26th, 2009

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Diagnostics Veteran Joins Shrink Nanotechnologies Board of Directors

Shrink Nanotechnologies, Inc., an innovative platform nanotechnology company developing technologies for a number of diverse fields ranging from medical diagnostics to solar cell concentrators, announced that Heiner Dreismann, Ph.D., has joined the company's Board of Directors and will chair Shrink's Business Advisory Board. Dr. Dreismann is the former Chief Executive Officer of Roche Molecular Diagnostics, a division of F. Hoffmann-La Roche Ltd.

Jun 25th, 2009

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MicroLine Technology Produces Extremely Flat Wafers to Meet Chip Manufacturing Lithography Requirements at 22nm And Beyond

To address the challenges of wafer polishing at future technology nodes, Peter Wolters GmbH, a wholly-owned subsidiary of Novellus Systems, has recently developed advanced polishing technology for its MicroLine AC 1500-P3 and AC 2000-P3 double-sided silicon wafer polishing systems that will meet the lithography requirements for semiconductor device manufacturing at 22nm and beyond.

Jun 23rd, 2009

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