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Viable CVD Phase Change Material Deposition for Sub-40 Nanometers Structures

ATMI, Inc. and Ovonyx, Inc. today announced that the companies successfully demonstrated Germanium Antimony Telluride (GST) -based Phase Change Memory (PCM) devices made with Chemical Vapor Deposition processes. These methods were scalable to sub-40 nanometers, high aspect ratio, high density, and three-dimensional structures.

Dec 9th, 2008

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