Imec and KLA Tencor have established a metrology method for optimizing the etch rate uniformity (ERU) in a transformer coupled plasma (TCP) reactor. The proposed metrology method makes use of PVx2 sensor wafers. For ion-assisted etch processes, the use of this PVx2-based method for ERU tuning results in lot-turn time savings of up to 80% compared to conventional etch rate uniformity tests.
Imec has fabricated tandem organic solar cells with peak conversion efficiencies of 5.15%. This was achieved by stacking two different planar heterojunction devices, each with a high open-circuit voltage.
Researchers have, for the first time, changed the orientation of a very large number of electron spins collectively at room temperature by pure electrical means, a feat that eventually could make devices that use spintronics more readily available for everyday uses.
ISO has published a new technical report, ISO/TR 11360:2010, Nanotechnologies - Methodology for the classification and categorization of nanomaterials, offering a comprehensive, globally harmonized methodology for classifying nanomaterials.
Harnessing darkness for practical use, researchers at the National Institute of Standards and Technology (NIST) have developed a laser power detector coated with the world's darkest material - a forest of carbon nanotubes that reflects almost no light across the visible and part of the infrared spectrum.
Spotting a single cancerous cell that has broken free from a tumor and is traveling through the bloodstream to colonize a new organ might seem like finding a needle in a haystack. But a new imaging technique from the University of Washington is a first step toward making this possible.