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  • P-753 LISA Piezo Stages / Actuators for X and Z-Motion with Direct Metrology for NanoAutomation®

P-753 LISA Piezo Stages / Actuators for X and Z-Motion with Direct Metrology for NanoAutomation®

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  • Stefan Vorndran,PI (Physik Instrumente) LP
  • P-753 LISA Piezo Stages / Actuators for X and Z-Motion with Direct Metrology for NanoAutomation®
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Contact Details

  • PI (Physik Instrumente) LP
  • Stefan Vorndran
  • 16 Albert St.
  • Auburn
  • MA
  • United States
  • +1 508-832-3456
  • http://www.pi-usa.us
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  • Stefan Vorndran,PI (Physik Instrumente) LP
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  • • Unique Design: Both Piezo-Stage and Piezo Actuator
    • Frictionless Precision Flexure Guiding System
    • 0.05 nm Resolution
    • Direct Metrology with Capacitive Sensors for Highest Precision
    • Ultra-Fast Response, Very Compact
    • PICMA® High-Performance Multilayer Piezo Drives
    • ID-Chip for Auto Calibrate Function
    • Vacuum Versions Available

    PDF Datasheet

  • PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 950+.


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