NaPa Emerging Nanopatterning Methods

The NaPa consortium complements the deep UV technology by providing low-cost scalable processes and tools to cover the needs of nanopatterning from CMOS back-end processes through photonics to biotechnology.

Address: c/o VTT, Vuorimiehentie 3
City: Espoo
Postcode: FI-02044
Country/Region: EU
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