Posted: April 21, 2009

Georgia Institute of Technology Orders Black Magic Plasma Enhanced CVD system from AIXTRON

(Nanowerk News) AIXTRON AG announced the receipt of a purchase order for a 4” Black Magic PECVD for carbon nanotube (CNT) growth from The Georgia Institute of Technology (GaTech) in Atlanta, GA, USA within the first quarter 2009.
This combined thermal CVD and plasma enhanced CVD tool is planned to be delivered in second quarter 2009. The NEST (Nanoengineered Systems and Transport) Research Group will use the system to process CNTs for CPU thermal management and for electrode materials in electrochemical energy conversion systems. The excellent thermal, electrical, and mechanical properties of CNTs offer great advances to the performance of these devices.
The AIXTRON system uses unique rapid heating and plasma technologies which have been proven in the field since 2005, and has enabled customers to produce various types of nanotubes, including low temperature, multiwall, single-wall and super-growth nanotubes. This system will be one of the first installed in the 30,000 SF clean room in the Marcus Nanotechnology Building at Georgia Tech, and will be used widely by several research groups at Tech.
Prof. Baratunde Cola, one of the participating faculty members in the program, states: "We like the Black Magic tool because it is easy to use and delivers proven technology that has been implemented at lab and industrial scales. These features accelerate the learning curve for CNT growth and will facilitate the transfer of CNT-based technologies under development at Georgia Tech to commercial products."
AIXTRON is a world leading supplier of Chemical Vapor Deposition (CVD), Atomic Vapor Deposition (AVD®) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry, with over 1,500 systems delivered to date. AIXTRON-Nanoinstruments is focused on serving the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes (CNT) and other nanomaterials. AIXTRON’s nanotube and nanowire track record includes customers such as Chalmers University of Technology, El- Mul Technologies, Harvard University, Kansas State University, Massachusetts Institute of Technology, Nanoconduction, Portland State University, Singapore Polytechnic, Santa Clara University, UC San Diego, University of Tuebingen, and Yale University
Source: AIXTRON (press release)
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