Posted: July 22, 2009

Tyndall National Institute Chooses Plasma ALD System from Cambridge NanoTech

(Nanowerk News) Cambridge NanoTech, a world leader in Atomic Layer Deposition (ALD) science and equipment, today announced that Tyndall National Institute in Cork, Ireland has purchased the Fiji™ Plasma ALD System to enhance their ALD research capabilities.
“The Tyndall Institute is the largest Micro/NanoElectronics; Photonics and Microsystems research institute in Ireland,” said Jeremy Davis, European Sales Director of Cambridge NanoTech. “The Fiji systems are the ideal complement to their materials research efforts in order to support the introduction of new materials into their semiconductor device fabrication process. Tyndall carefully selected the plasma assisted ALD Fiji system as the tool most suited to support their research efforts.”
“We decided to purchase the Fiji system for a number of reasons,” said Alan Blake, Tyndall’s process engineer. “Overall, we believe Cambridge NanoTech offers the best value for the money. In terms of performance, the dual chamber system provides excellent process versatility, more functionality, and fits in a very small footprint as compared to competitive products. Plus, Cambridge NanoTech has an excellent reputation in the ALD community.”
Blake continued, “The team at Cambridge NanoTech also provided us with tremendous support during the start-up phase as well as superb training. They are very accommodating and continue to provide follow-up support as needed.”
Fiji Plasma ALD System
The Fiji System delivers performance and versatility for both plasma and thermal ALD deposition in an economical package. Its flexible system design, including a dual chamber configuration, is customizable for maximum experimental efficiency. With very low precursor consumption, fully integrated ALD Shield™ vapor trap, and off-the-shelf replacement costs, the Fiji reduces operating costs and simplifies system maintenance.
About Cambridge NanoTech
Cambridge NanoTech focuses on simplifying the science of atomic layer deposition for customers worldwide — from universities to the largest corporations — by delivering comprehensive services and versatile, turnkey systems that are accessible, affordable and accurate to the atomic scale. Cambridge NanoTech, founded in 2003, grew directly out of Gordon Lab at Harvard University, one of the foremost ALD research groups in the world.
About Tyndall National Institute
Tyndall National Institute is one of Europe's leading research centres, specialising in ICT hardware research and the education of next generation researchers. It was established in 2004 bringing together a critical mass of over 350 researchers, engineers, students and support staff focused on quality research and the commercialisation of technology through industry collaboration. Tyndall’s research expertise spans a range of technologies from atoms to systems in the areas of micro-nanoelectronics, microsystems, and photonics. The research centres are backed by a strong theory, modelling and design centre and a wafer fabrication facility with CMOS, III-V and MEMS capability.
Source: Cambridge NanoTech (press release)
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