Posted: September 21, 2009

In-Situ XRF Yield Management tool for CIGS Composition and Thickness Measurement

(Nanowerk News) Solar Metrology, a global provider of X-Ray Fluorescence (XRF) analysis tools, expands its SMX XRF tool portfolio for film composition and thickness measurement of CIGS photovoltaic depositions with the addition of the System SMX-ISI.
Solar Metrology’s System SMX-ISI is an in-situ x-ray fluorescence (XRF) metrology tool platform that provides composition and thickness measurements for thin film solar PV metal film stacks on flexible roll to roll substrates such as stainless steel, aluminum and polyimide or rigid substrates such as float glass.
Typical measurement applications include Mo thickness and all CIGS combinations (including all CIG alloys and/or film combinations and final CIGS formulations).
SMX-ISI is fast, flexible and easily integrated into any vacuum deposition tool or vacuum process station or point of a vacuum process line.
SMX-ISI utilizes X-ray fluorescence, an enabling technology for CIGS manufacture, that delivers yield management and yield improvement by allowing in-situ process control. The SMX-ISI tool Platform does not affect your process since all SMX-ISI tool components reside outside of vacuum for optimum performance and serviceability.
Solar Metrology's SMX Measurement tool platform provides a production-ready suite of film thickness and composition measurement tools for research and process development, in-process monitoring and post-process quality control. Solar Metrology is the global leader in the development and manufacture of high-performance X-Ray Fluorescence (XRF) analysis tools, specifically engineered to meet the demanding thin film measurement requirements of the solar electric and renewable power industries.
Source: Solar Metrology (press release)
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