Posted: October 1, 2009

Nikon Introduces BW-H501 High-Speed, High-Precision 3D Surface Profile System

(Nanowerk News) Nikon Instruments, Inc. introduced the BW-H501 high-speed 3D surface profile system, offering rapid high-precision 3D surface inspection. The BW-H501 system features real-time height observation with high-precision height measurement, making analysis and evaluation of object surface roughness possible. Additionally, a heated stage allows observation and analysis of the deformation process of film and gel samples in real time.
"Observation and analysis of optically diffusive surfaces is a weakness of conventional optical systems, but it presents little difficulty for the BW-H501," said Mike Metzger, General Manager, Industrial Microscopy & Metrology. "The BW-H501's unique combination of a high-speed camera system with newly developed fringe cycle method software makes surface profiling possible in as little as 200ms for a height of 40 micrometers."
Using the fringe cycle method, the coordinate value on the Z-axis with the maximum local focus measure is taken as the height of each pixel, generating an interference fringe on the surface of the object with a two beam interference objective lens. This allows the BW-H501 to achieve effective height resolution of 100 nm and repeatable precision of Sigma =3D 10 nm. Additionally, the BW-H501's X-Cycle Imager makes image capture of 900 fps possible with output and display of real-time height images at 5 fps. Equipped with Nikon's BridgeElements software, multiple images can be processed simultaneously, allowing real-time image comparison.
About Nikon Instruments, Inc.
Nikon Instruments, Inc is a world leader in the development and manufacture of optical and digital imaging technology for biomedical and industrial applications. Now in its 91st year, Nikon provides complete optical systems that offer optimal versatility, performance and productivity. Cutting-edge instruments include microscopes, precision measuring equipment, digital imaging products and software. Nikon Instruments is the microscopy and digital imaging arm of Nikon Inc., the world leader in digital imaging, precision optics and photo imaging technology. For more information, visit . Product-related inquiries may be directed to Nikon Instruments at 800-52-NIKON.
Source: Nikon (press release)
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