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Posted: February 4, 2010
AbsoluT - LayTec's New Development for Precise On-site Temperature Calibration
(Nanowerk News) LayTec has now developed the ultimate temperature calibration
tool for its EpiTT, EpiTwinTT and EpiCurve®TT tools: the
AbsoluT. The new instrument is designed for on-site use in
AIXTRON Planetary® and CRIUS reactors. It performs temperature
calibration inside the MOCVD chamber through the
original viewport without any sophisticated alignment and
with unrivaled accuracy.
All reactor-to-reactor and ringto-
ring temperature variations
caused by manufacturing
tolerances of the equipment
(viewport and window
variations) can now be easily
corrected. The new method will
replace the less accurate and
more time consuming method
of eutectic calibration used currently.
AbsoluT’s head with reference light emitter.
A calibration with AbsoluT takes only 30 minutes and shortens
maintenance cycles profoundly. The user just has to put
the AbsoluT head into the chamber and press it with its heat
resistant surface against the reactor lid under the optical
view-port. The calibration data is automatically tracked and
processed for further temperature measurements.
Recently, the new method was successfully approved at
industrial customer sites. A customer who tested AbsoluT
wrote: “Your new calibration method is very successful. After
calibration the temperature measurement in MQW showed
identical results in each system. I think your team did a very
good job here!“
As the original viewport of the MOCVD system is not available
at LayTec for pre-calibration, on-site variations of the viewport
diameter (typically in the range of 10 %) cannot be corrected.
The viewport aperture, however, affects temperature sensing
in CRIUS type of reactors because the intensity of the IR radiation
detected by the pyrometer changes if the view-port diameter
differs. The new AbsoluT calibration completely eliminates
these effects: after temperature calibration (red), the correct
temperature of 760°C was measured and the temperature variation
of ± 1.3 K was validated by identical photoluminescence
(PL) emission wavelength of the wafers from all 5 reactors.
AbsoluT will be available to LayTec customers in April 2010.
For further information please contact [email protected]