Posted: February 22, 2010

Applied Materials Hosts Forum to Explore High-Productivity Next-Generation Lithography

(Nanowerk News) Current optical lithography techniques for patterning semiconductor devices are rapidly reaching their limits. While immersion lithography with double patterning appears to be extendible to 19nm for flash memory devices and potentially to 15nm logic designs, EUV (extreme ultraviolet) lithography is viewed as the most likely successor. However, it’s vital that EUV lithography and its related processes are production ready for this major transition – able to reach acceptable levels of productivity and yield. On February 24, Applied Materials will host an in-depth seminar to explore the techniques that will be required for cost-effective advanced scaling.
Titled “High-Productivity Technologies for Next Generation Lithography,” the forum will feature experts drawn from logic and foundry manufacturers, research consortia and the equipment sector. During a full day of technical presentations at the Sainte Claire Hotel in San Jose, California, the speakers will present the latest advancements in mask and wafer patterning, inspection and metrology that are enhancing both process precision and productivity.
Speakers: Chas Archie – Senior Physicist, IBM; Ben Bunday – Senior Member of Technical Staff, SEMATECH; Jo Finders – Fellow, ASML Ted Liang – Senior Staff Engineer, Intel; Hans Stork – Chief Technology Officer of Silicon Systems Group, Applied Materials; Obert Wood – Principal Member of Technical Staff, GLOBALFOUNDRIES
Where: Sainte Claire Hotel, 302 S Market Street, San Jose, CA 95113
When: Wednesday, February 24, 2010, 9:00 am to 6:30 pm.
Applied Materials, Inc. is a global leader in Nanomanufacturing Technology™ solutions with a broad portfolio of innovative equipment, service and software products for the fabrication of semiconductor chips, flat panel displays, solar photovoltaic cells, flexible electronics and energy efficient glass. At Applied Materials, we apply Nanomanufacturing Technology to improve the way people live.
Source: Applied Materials (press release)
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