Posted: April 26, 2010

Nanometrics Announces Follow-On Shipments and Qualification of UniFire for High Volume Production

(Nanowerk News) Nanometrics Incorporated, a leading supplier of advanced process control metrology systems used primarily in the manufacturing and packaging of semiconductors, solar photovoltaics and high-brightness LEDs, today announced that additional UniFire™ 7900 metrology systems have been delivered and qualified by an existing customer, and are currently in production for high volume manufacturing process control of advanced wafer-level packaging processes. This multi-system follow-on installation is part of an ongoing program to deploy Nanometrics’ UniFire technology across multiple manufacturing sites. The systems are being used to measure critical dimensions (CD), topography and overlay registration at the 32nm node for die preparation applications.
“This follow-on order further extends the success of the UniFire technology as it transitions from development into high volume production,” commented Bruce Crawford, COO of Nanometrics. “We have worked to seamlessly integrate the UniFire product and personnel, while continually focusing on uninterrupted product development and customer support during the transition. Nanometrics’ technology is gaining acceptance as the tool of choice for complex topography applications in the die metallization segment, where we provide a cost of ownership advantage over competing technologies, backed by our worldwide applications and service organizations.”
The UniFire platform has now been successfully deployed in both front-end-of-line and back-end-of-line semiconductor manufacturing processes, for applications including advanced packaging, lithography, etch, chemical mechanical polishing (CMP) and thin film deposition. The UniFire has unique capabilities for high precision measurement of two-dimensional and three-dimensional structures for depth, critical dimension, profile, and film thickness control for advanced semiconductor manufacturing processes.
About Nanometrics
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used primarily in the manufacturing of semiconductors, advanced wafer-scale packaging, solar photovoltaics and high-brightness LEDs, as well as by customers in the silicon wafer and data storage industries. Nanometrics standalone and integrated metrology systems measure various thin film properties, critical dimensions, overlay control, topography, and optical, electrical and material properties, including the structural composition of silicon, compound semiconductor and photovoltaic devices, during various steps of the manufacturing process, from front end of line substrate manufacturing through die preparation for advanced packaging. These systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide.
Source: Nanometrics (press release)
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