Posted: May 20, 2010

Epistar of Taiwan Qualifies Veeco MOCVD System for High Volume Production

(Nanowerk News) Veeco Instruments Inc. announced today that Epistar Corporation, headquartered in Taiwan, has recently qualified Veeco’s TurboDisc® K465i™ gallium nitride (GaN) Metal Organic Chemical Vapor Deposition (MOCVD) System for high volume light emitting diode (LED) production.
Dr. M.J. Jou, President of Epistar, commented, “Ramping to production quickly and maintaining high throughput is critical to our success. Veeco enabled us to qualify the K465i rapidly and it provides the automation required to produce highly uniform LEDs with minimal downtime. The K465i provides Epistar the ease-of-use and system availability to meet our growing production requirements.”
Bill Miller, Ph.D., Senior Vice President, General Manager of Veeco's MOCVD Operations commented, “As a result of this successful qualification, we currently expect to ship a significant number of tools to Epistar this year. We are excited that we have been chosen to support their volume capacity ramp in 2010. This is an important milestone for Veeco as we continue to build our Taiwan installed base.”
With superior wavelength uniformity and excellent run-to-run repeatability, the production-proven K465i extends Veeco’s lead in capital efficiency – the number of good wafers per day for each capital dollar – for high volume LED manufacturers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.
About Epistar Corporation
Epistar Corporation, located in the Hsinchu Science-based Industrial Park, Taiwan, manufactures high brightness LEDs of compact size, low power consumption and long operation life. They are widely used in areas such as fax machines, scanner lighting, automotive interior and exterior lighting, LCD backlighting, outdoor/indoor displays, traffic signals, indicators for various consumer electronic equipment and eventually light sources for general illumination. Epistar has successfully commercialized the full spectrum range of high brightness LEDs.
About Veeco
Veeco Instruments Inc. designs, manufactures, markets and services enabling solutions for customers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets. We have leading technology positions in our three businesses: LED & Solar Process Equipment, Data Storage Process Equipment, and Metrology Instruments. Veeco’s product development, marketing, engineering and manufacturing facilities are located in New York, New Jersey, California, Colorado, Arizona, Massachusetts and Minnesota. Global sales and service offices are located throughout the U.S., Europe, Japan and Asia Pacific.
Source: Veeco (press release)
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