Posted: June 15, 2010

AIXTRON Ships Next Generation QXP 8300 ALD Deposition Tool to Major Korean Customer

(Nanowerk News) AIXTRON AG today announced shipment of its next generation QXP 8300 ALD product to a leading Korean DRAM manufacturer. The tool will be fully operational at the customer site by the end of Q2 2010.
"The QXP 8300 will be used to support our advanced technology production ramp" says Dr. Sasangan Ramanathan, AIXTRON Inc. CTO. "Particularly gratifying to us is that this customer is well known for leadership founded on pushing both technology and production limits – the fact that our tool has been selected over the competition is testament to the value proposition being delivered on both fronts by the QXP 8300."
The QXP 8300 synergistically combines the expertise of both unique precursor delivery technology and showerhead technologies patented and pioneered by AIXTRON and implemented by the large and expanding global customer base.
Dr. Bernd Schulte, AIXTRON COO comments "I am pleased to announce another major milestone for our QXP 8300 and the globally widening proliferation of AIXTRON ALD technology."
With strong and growing global interest in the AIXTRON QXP 8300 and its patent protected precursor delivery technology Dr. Schulte adds that "as the industry regains its momentum in 2010 customers are clearly founding their growth on cutting edge innovation in a production proven and economically winning package. Nowhere is this probably more critical than in deposition of next generation high k and metal films and AIXTRON is proud to be a solution provider for these challenges."
Source: AIXTRON (press release)
Subscribe to a free copy of one of our daily
Nanowerk Newsletter Email Digests
with a compilation of all of the day's news.
These articles might interest you as well: