Posted: June 20, 2010

Picosun Launches Automated ALD Cluster System

(Nanowerk News) Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems today launched its latest ALD systems product, Picoplatform™, in connection with the 10th International Conference on Atomic Layer Deposition, which was opened today in Seoul, the Republic of Korea.
"Picoplatform™ vacuum cluster continues the idea of unique scalability which is inbuilt in all Picosun products. This customer-proven concept is providing a clear path from R&D to production with the very same tool without the need of acquiring a second system when moving from the test-tube phase into application oriented research or pilot manufacturing," explains Juhana Kostamo, Managing Director of Picosun.
Picoplatform™ system enables automatic cassette-to-cassette loading between the carrier cassettes and clustered ALD tools without breaking the vacuum in between. Clustering with other process modules such as pre-treatment and deposition systems is also possible.
"First of our new Picoplatform™ systems was built in 2008 and has already undergone and passed our rigid testing procedures. The large customer base of Picosun ALD tools and the fact that Picosun is working closely with the leading provider of vacuum automation solutions to the Semiconductor industry, Brooks Automation, a company based in Massachusetts, USA, guarantees optimal performance, support, manufacturability and maintainability of automated Picosun ALD systems," Kostamo says.
Clinton M. Haris, Vice President and General Manager of Brooks Automation's Systems Solutions Group, adds, "Brooks' suite of automation systems and services are well suited to support companies such as Picosun throughout the entire product lifecycle. We are delighted that Picosun has chosen Brooks to supply the automation system for the Picoplatform™ product."
"We are pleased to contribute to the launch of the new Picoplatform vacuum cluster. By using PEER Group's award-winning PEER Tool Orchestrator (PTO) software product, Picosun will have the flexibility to meet the unique automation requirements of any fab, " says Bill Schmalz, Global OEM Sales Manager of The PEER Group Inc. "Moreover, PEER Group, a company based in Ontario, Canada, has proven to be a valuable partner in realizing software adaptations required to customize the Picoplatform™ product according to the end-user needs. We are very proud to announce the Picoplatform™ product line and the fact that first sales for this new product have been realized and we are looking forward to booking a number of orders in the coming few months."
Picosun holds a prominent position as one of the leading commercial partners of the 2010 ALD Conference. On Wednesday evening, Picosun has the honor to co-host a special dinner, organized by the Ambassador of the Republic Of Finland in Seoul, to celebrate the continuous success of the technique and science of ALD, originally invented in 1974 by Dr. Tuomo Suntola, who today serves as member of the board of directors of Picosun.
Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE™ ALD process tools are installed in various universities, research institutes and companies across four continents. Picosun Oy is a part of Stephen Industries Inc Oy.
Source: Picosun (press release)
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