Posted: September 7, 2010

First Single-port EpiCurveTT for Showerhead Reactors Installed at Fraunhofer Institute

(Nanowerk News) LayTec is happy to announce a successful installation of EpiCurveŽTT on an Aixtron Close Coupled Showerhead Ž (CCS) MOCVD system at Fraunhofer Institute for Applied Solid State Physics (IAF) in Freiburg, Germany.
For the first time an EpiCurveŽTT was installed on a showerhead system on only one viewport! In the past, since the viewports of such systems are so small, we used 2 separate windows: one for curvature and one for temperature and reflectance measurements.
Now, due to the improved design, all three parameters are measured through one standard AIX CCS viewport. Dr. Chunyu Wang and his team at IAF will use the tool for growth control of GaN on silicon substrates. The simultaneous in-situ monitoring of wafer temperature, reflectance and curvature will be used to engineer the stress in the epilayers.
Dr. Wang commented: "The new sensor will help us to get flat and crack-free GaN layers on Si substrates for future sophisticated electronic devices."
Source: LayTec (press release)
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