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Posted: Jan 10, 2011
Nissan Chemical Joins SEMATECH's Resist Center at UAlbany NanoCollege
(Nanowerk News) SEMATECH, a global consortium of chipmakers, and Nissan Chemical Industries, Ltd., (NCI) a Japanese chemical company supplying cutting-edge products in fields including electronic materials, today announced it has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
NCI will collaborate with SEMATECH engineers on advanced adhesion enhancing materials in extreme ultraviolet (EUV) lithography. Specific areas include reduction of line edge roughness (LER), elimination of pattern collapse in images below 22 nm, and ultimate resolution of new resists.
"We are excited to partner with SEMATECH to develop and commercialize EUVL technology for the manufacturing of future nanoelectronics devices," said Yutaka Niitsu, senior managing director, Electronic Materials Division, NCI. "This new partnership combines NCI's experience in adhesion enhancing materials and SEMATECH's strengths in the development of fundamental resist processes that are critical for EUV infrastructure."
"Our partnership with NCI will help strengthen the RMDC's ability to address critical issues in adhesion enhancing materials," said John Warlaumont, vice president of Advanced Technologies at SEMATECH "This new collaboration illustrates the effectiveness of SEMATECH's efforts to include a broader range of industry participants in the search for new solutions to our common technology challenges."
"The leading-edge research in EUVL technology at CNSE's Albany NanoTech Complex will be strengthened by the addition of NCI," said Richard Brilla, CNSE vice president for strategy, alliances and consortia. "This further builds the world-class capabilities at the UAlbany NanoCollege, and demonstrates the success of the SEMATECH-CNSE partnership in establishing collaborations to accelerate the advanced technologies driving the nanoelectronics industry."
At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.
About Nissan Chemical Industries, Ltd.
Nissan Chemical Industries, Ltd. has 120 years history providing many unique products in a wide range of fields, from basic chemical products supporting our daily lives to electronic industrial materials that contribute to technological innovation in the IT and display industries. By communicating with its users, it intends to continue developing products that meet their high-level needs. Nissan Chemical Industries, Ltd. has annual sales of $1.5 billion and employs 1700 people worldwide. For more information on Nissan Chemical, please visit http://www.nissanchem.co.jp/english/index.html.
For over 20 years, SEMATECH® (www.sematech.org), the international consortium of leading semiconductor manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $6.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. An expansion currently in the planning stages is projected to increase the size of CNSE's Albany NanoTech Complex to over 1,250,000 square feet of next-generation infrastructure housing over 105,000 square feet of Class 1 capable cleanrooms and more than 3,750 scientists, researchers and engineers from CNSE and global corporations. For information, visit www.cnse.albany.edu.