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Posted: May 26, 2011
SPTS and Australia's Griffith University Sign Joint Development Agreement to Develop Silicon Carbide on Silicon Technology
(Nanowerk News) SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch and deposition, and thermal processing equipment for the semiconductor and related industries, and Griffith University in Australia today announced a joint development agreement (JDA) targeting the commercialization of Silicon Carbide (SiC) on Silicon (Si) technology. SiC on Si substrates have a wide variety of applications for the rapidly growing light-emitting diode (LED), micro-electro-mechanical systems (MEMS) and Power markets.
SiC is an important substrate for growing the GaN films used to manufacture LEDs. The increased radiation hardness, mechanical strength and thermal properties of SiC also make it a suitable replacement for silicon in MEMS devices for harsh environments. In addition, SiC is used to create semiconductor devices for high power, high frequency applications where the electrical properties of SiC are significantly superior to common silicon. Technology created by the research team at Queensland Microtechnology Facility (QMF) at the Griffith University's Queensland Micro- and Nanotechnology Centre (QMNC), has demonstrated the ability to grow crystalline SiC directly onto low cost silicon wafers. Through the JDA, SPTS will develop the thermal process and equipment expertise necessary to commercialize the technology.
Three key technologies required for SiC on Si devices are SiC deposition, etch and oxidation. The QMNC has commercially orientated research into all these areas. "The JDA enables transfer of this SiC deposition process technology to device research and development activities, and provides a bridge to volume production through batch processing for up to 300mm diameter Si wafers. SPTS's strength in thermal processing makes them an attractive partner," said Alan Iacopi, Operations Director of QMNC. "This JDA is an important step in the commercialization of our SiC research efforts, especially with a partner with the global reach of SPTS" agreed Sima Dimitrijev, Project Leader and Deputy Director of QMNC.
"As a market leader in providing capital equipment to the MEMS, LED and Power markets, SPTS is constantly looking at cutting-edge development opportunities. We are very pleased to have this opportunity to work with leading researchers at Griffith University to commercialize their SiC on Si technology," said William Johnson, president and CEO of SPTS. "Providing production knowledge to this collaboration and helping to develop and deliver new materials processing technology is an important business strategy. This JDA further enhances the portfolio of offerings to our served markets and will help to broaden our customer base."
About SPP Process Technology Systems
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd., and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications. For more information about SPTS, please visit www.spp-pts.com.
About QMNC and QMF
The Queensland Micro- and Nanotechnology Centre is a science and engineering research centre based at Griffith University focusing on micro- and nanotechnology issues integral to the development of clean and intelligent systems. The Centre brings together researchers with expertise in materials development, sensing, microelectronic engineering and microtechnology and the fundamental theory of condensed matter, across the disciplines of physics, chemistry, applied mathematics and engineering. The Queensland Microtechnology Facility, within the QMNC, is focused on leading SiC on Si technology to commercialisation. Funded by Queensland State Government and Australia's National Fabrication Facility, it houses a large silicon wafer fabrication processing capability and enables research and development of SiC on Si material for mechanical and semiconductor devices.
Source: SPP Process Technology Systems (press release)