Posted: May 29, 2008

SUSS Automated Bond Cluster Selected for MEMS Foundry in Korea

(Nanowerk News) SUSS MicroTec (FWB:SMH) (GER:SMH), a leading supplier of process and test solutions for the semiconductor industry,announced today that u-ITC, Korea, has selected the advanced wafer bonding equipment of SUSS for its MEMS foundry.
u-ITC is a world class MEMS foundry specializing in MEMS sensors. The Incheon facility will incorporate design, manufacture, assembly and test within one location for the growing fabless MEMS market.
"The SUSS ABC200 Automated Bond Cluster is a key acquisition for our foundry operations," said Suh, Dong-Ryang Ph.D, Director at u-ITC, "we can easily meet our customers' needs by using a cluster tool that can be quickly reconfigured for changing process conditions."
"The flexibility of the SUSS bond cluster to quickly reconfigure process parameters from small runs to full production is a big advantage of the toolset, especially in the case of a foundry serving new markets," said Daniel T. Hurley, International Product Manager, Wafer Bonder Division, SUSS MicroTec. "We are pleased to support u-ITC as they establish themselves as the primary best in class MEMS foundry in Korea."
The ABC200 is a 200mm Automated Bond Cluster. It delivers superior post-bond alignment accuracy resulting from precision mechanics, uniform force capability and leading edge temperature control. SUSS MicroTec offers advanced wafer bonding solutions for the MEMS, SOI, Optoelectronics, and 3D Interconnect markets.
About SUSS MicroTec
SUSS Micro Tec Inc. is a part of the SUSS MicroTec group listed in Deutsche Borse AG's Prime Standard.
SUSS MicroTec is one of the world's leading suppliers of process and testing solutions for markets such as advanced packaging, MEMS, nanotechnology, compound semiconductor, Silicon-On-Insulator and 3D Interconnect. SUSS MicroTec enables its customers to increase process performance while reducing cost of ownership and to meet the volume requirements of fast growing markets with high quality solutions.
SUSS MicroTec supports more than 8,000 installed mask aligners, coaters, bonders and probe systems with a global infrastructure for applications and service.
Headquartered in Garching near Munich, Germany, SUSS MicroTec employs more than 730 employees worldwide.

SUSS MicroTec Inc.

Marketing Communications Manager, Leah McMahon

Phone: +1-800-685-7877

Email: [email protected]

Source: SUSS MicroTec
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