Posted: July 1, 2008

Rohm and Haas Announces Enhanced Version of VaporStation Central Delivery System

(Nanowerk News) Rohm and Haas Electronic Materials (NYSE:ROH) today announced that a second-generation VaporStation™ central delivery system, which provides several enhancements to the highly-capable original version, is now available. The new systems use the latest version of the IvMB™ inverted mini bubbler, optimized control software and an improved panel layout.
As the leading global supplier of metalorganic (MO) precursors, Rohm and Haas designed the VaporStation central delivery system in cooperation with Matheson Tri-Gas, Inc., a leader in molecule delivery systems for more than 15 years. The system is designed to deliver trimethylgallium (TMGa) and other MO precursors to multiple MO chemical vapor deposition (MOCVD) reactors from a central supply source cabinet using a high-purity carrier gas. MO precursors are used to produce LEDs, solar cells, laser diodes for CD and DVD, and other compound semiconductor devices.
Rohm and Haas Electronic Materials engineered the upgraded system to provide a near constant fill level in the IvMB evaporator, optimized metalorganic-carrier gas intermixing, and improved efficiency and ergonomics. "First-generation systems have been installed at industry-leading manufacturers since 2004 with an excellent record for reliability and performance," said Joe Reiser, general manager for Rohm and Haas Electronic Materials’ Metalorganics business. "Everything we learned from the use of these systems and the customer feedback we received was incorporated into the design of the second generation."
The flexibility, control and economy of the VaporStation central delivery system has appealed to Rohm and Haas Electronic Materials customers since its debut in 2004. The system can deliver a stable MO precursor concentration at a precisely controlled flow rate to up to 10 MOCVD reactors from a single 20 kg supply cylinder. The VaporStation delivery system has shown excellent performance and superior economy over the traditional on-board MO source approach in which each MOCVD reactor requires its own cylinder.
Rohm and Haas Electronic Materials anticipates that the installed base of its VaporStation central delivery system will continue to rise quickly and has recently installed several second-generation VaporStation central delivery systems at leading LED manufacturers and more installations are scheduled this year. As the high-brightness LED industry continues to add capacity, the industry is turning towards innovative technology to reduce their production costs and drive efficiency.
Rohm and Haas Electronic Materials is also closely monitoring customer demand and maintaining its quality assurance efforts aimed at zero-error delivery of precursors during the deposition process. "With a central delivery system supplying a significant portion of an LED fab, there is no tolerance for any error and we are ready for this challenge," said Reiser. "Rohm and Haas has more than 30 years of experience providing high purity metalorganic precursors to the compound semiconductor markets. Our close collaboration with our customers and MOCVD equipment manufacturers has shown us that there is a need for the VaporStation delivery system. We believe we are best positioned to supply both the precursors and a reliable delivery system".
IvMB™ is a trademark of Matheson Tri-Gas, Inc.
About Rohm and Haas Company
Leading the way since 1909, Rohm and Haas is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company’s technologies are found in a wide range of industries including: Building and Construction, Electronics and Electronic Devices, Household Goods and Personal Care, Packaging and Paper, Transportation, Pharmaceutical and Medical, Water, Food and Food Related, and Industrial Process. Innovative Rohm and Haas technologies and solutions help to improve life every day, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.9 billion in 2007. Visit for more information. imagine the possibilities™
About Rohm and Haas Electronic Materials
Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, advanced packaging, and flat panel display industries, its products and technologies are integral elements in electronic devices around the world.
Through its Microelectronic Technologies business unit, Rohm and Haas Electronic Materials is at the forefront of the development of advanced CVD and ALD precursors for the semiconductor industry. The business is also a leading supplier of high-purity III-V metalorganic chemical vapor deposition (MOCVD) precursor materials. The company’s precursors are used in all major commercial compound semiconductor applications, including large video displays, lighting, voice/data communication devices, entertainment devices and solar cells. Additional information about Rohm and Haas Electronic Materials can be found at
About Matheson Tri-Gas, Inc.
Matheson Tri-Gas, Inc., is a single source for industrial, medical, specialty and electronic gases, gas handling equipment, high performance purification systems, engineering and gas management services, and on-site gas generation with a mission to deliver innovative solutions for global customer requirements. Matheson Tri-Gas, Inc., is the largest subsidiary of the Taiyo Nippon Sanso Corporation Group, one of the five largest suppliers of industrial, specialty, and electronics gases in the world.
Source: Rohm and Haas
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