Cambridge NanoTech Introduces Latest Addition to its Family of Atomic Layer Deposition System
Posted: October 20, 2008

Cambridge NanoTech Introduces Latest Addition to its Family of Atomic Layer Deposition System

(Nanowerk News) Today, Cambridge NanoTech, the leading supplier of Atomic Layer Deposition (ALD) systems for research and industry, announced the release of the first Savannah S300 system. The S300 builds on the success of the S100 and S200, offering the same combination of ease of use, reliability and experimental flexibility in a larger format, capable of handling substrates up to 300mm in size.
“We are pleased to announce the first sale and shipment of the newest addition to our highly successful Savannah family – the S300,” said Dr. Jill Becker, Founder of Cambridge NanoTech. “The S300 has all the capabilities that our customers value in the S100 and S200, in a compact and affordable format that can accommodate larger substrates.”
With more than 110 Savannah systems shipped worldwide, Cambridge NanoTech has established itself as the world leader in ALD systems and services for research and industry. Experiments conducted on the Savannah family of systems by leading ALD researchers have resulted in the publication of more than 100 peer-reviewed articles. The newest addition to the Savannah family will be on display at the American Vacuum Society conference in Boston, MA during the week of October 20th and can be seen by visiting Cambridge NanoTech in booth #402 at the Hynes Convention Center.
About Cambridge NanoTech
Cambridge NanoTech focuses on simplifying the science of atomic layer deposition solutions for customers worldwide-from universities to the largest corporations-by delivering comprehensive services and versatile, turnkey systems that are accessible, affordable and accurate to the atomic scale. Cambridge NanoTech, founded in 2003, grew directly out of one of the foremost ALD research groups in the world – the Gordon Lab at Harvard University. Learn more at
Source: Cambridge NanoTech (press release)
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