• SML Electron Beam Resist
  • SML Electron Beam Resist

SML Electron Beam Resist


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  • Daniel Royston,EM Resist Ltd
  • SML Electron Beam Resist

Contact Details

  • EM Resist Ltd
  • Daniel Royston
  • Block 23, Alderley Science Park
  • Alderley Edge
  • Cheshire
  • United Kingdom
  • +44 (0) 1625704465

Contact Supplier

  • Daniel Royston,EM Resist Ltd

  • The high performance SML resist is a novel polymer that has been specifically designed to answer the demands of the EBL community. It can be simultaneously patterned into high resolution and high aspect ratio patterns, even at low acceleration voltages and without the aid of proximity effect correction.

    SML resist has been specifically designed to fit in with a standard PMMA process. No change in chemistry or process training is required.


    Very high resolution: < 10nm

    Very high aspect ratio:
    > 10:1 @ 30 kV
    >50:1 @ 100 kV

    Thickness: 30 nm – 2000 nm

    Superior LER/LWR

    Very straight sidewalls

    Excellent surface adhesion (HMDS not required)

    Excellent etch resistance

    Do you require a sample?
    Please visit or email [email protected] to speak to our sales or applications team

  • EM Resist Ltd. is specialised in developing materials used for lithography and nanofabrication applications. With over 20 years combined experience, we are continually developing the next generation of materials that will enable you to push forward in your research and development.

    Can we help you?

    Do you have a specific application or problem that you are trying to solve? Are conventional tools or materials not working for you? Let us know and we may be able to help. With our deep in house knowledge on electron beam lithography and close connection with our sister companies EM Analytical & EM Systems Support, we can help you design materials and tools specific for your application.

    We have a full suite of nanofabrication tools that are available for one-off project work or complete proof of principle projects.
    Visit company website

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