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The Microsystems and Nanotechnology group deals with Opto- and Electro-mechanical systems, MEMS and MOEMS. Optical detection modulation with piezoelectric devices; Physical, chemical and biological sensors (optical, piezoelectric, electrochemical). Polymer deposition; Nanoparticles, nanostructures and nanodevices; Atomic Force Microscope and Electron Beam Lithography.
| Address: | Institute for Systems based on Optoelectronics and Microtechnology, Ciudad Universitaria |
| City: | Madrid |
| State/Province: | |
| Postcode: | 28040 |
| Country/Region: | Spain |
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