Manufactures micro and nano structured products for many different high-tech applications such as display technology, micro-optics, micro-electronics/semiconductors, biotechnology, fluid technology and micro actuator technology.
TETRA develops, manufactures and distributes systems and components of sensors, robotics and automation. Our product portfolio ranges from highly specialized test and production systems for micro and nano technology to lightweight robotic systems for automation of sensitive production and service processes.
ISOPAD is currently supplying custom design leading edge radiant heaters for use in CVD/PVD vacuum appplications. Customers include the major suppliers of OEM equipment to the Semiconductor, LCD and Photovoltaic industries where close control and reliable solutions for thin and thick film depoition are required.
VeriCold Technologies is specialized in cutting-edge X-ray spectroscopy and cooling solutions. Driven by innovative markets (semiconductor, biotechnology and nanotechnology) VeriCold's technology is a key-enabler for new processes in manufacturing, quality control and research.
Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and several new emerging markets.