Nanotechnology Research Lab

Fraunhofer ENAS

ENAS deals with smart systems integration with micro- and nanotechnologies. Reasearch focuses on development of MEMS/NEMS, 3D-integration and reliability.
Location
Fraunhofer-Einrichtung für Elektronische Nanosysteme, Reichenhainer Str. 88
Chemnitz, 09126
Germany
6d piezo alignement system