The specific targeted research project RIMANA (Radical Innovation Maskless Nanolithography) aims to research and develop a key maskless nanolithography technology for low to medium volume production, essential for the semiconductor industry and emerging nanotechnology industry.
Address: | c/o IMS Nanofabrication AG, Schreygasse 3 |
City: | Vienna |
State/Province: | |
Postcode: | A-1020 |
Country/Region: | EU |