Ritsumeikan University Micro Nanoscience Integrated Systems

Research target is establishment of new evaluation technique for MEMS / NEMS material properties. Research of silicon nanolithography technique and development of MEMS/NEMS devices are also performed.

Address: 1-1-1 Nojihigashi, Kusatsu-shi
City: Shiga
Postcode: 525-8577
Country/Region: Japan
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