The Microsystems and Nanotechnology group deals with Opto- and Electro-mechanical systems, MEMS and MOEMS. Optical detection modulation with piezoelectric devices; Physical, chemical and biological sensors (optical, piezoelectric, electrochemical). Polymer deposition; Nanoparticles, nanostructures and nanodevices; Atomic Force Microscope and Electron Beam Lithography.
Address: | Institute for Systems based on Optoelectronics and Microtechnology, Ciudad Universitaria |
City: | Madrid |
State/Province: | |
Postcode: | 28040 |
Country/Region: | Spain |