University of Michigan - Lurie Nanofabrication Facility

The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology.

Address: 1301 Beal Ave
City: Ann Arbor
State/Province: Michigan
Postcode: 48109
Country/Region: USA
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