University of Michigan Michigan Nanofabrication Facility (MNF)

The MNF is one of the leading centers worldwide on micro electromechanical systems (MEMS) and microsystems. It provides facilities and processes for the integration of Si integrated circuits and MEMS with nanotechnology, with applications in biology, medical systems, chemistry, and environmental monitoring.

Address: 1301 Beal Avenue
City: Ann Arbor
State/Province: Michigan
Postcode: 48109
Country/Region: USA
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