Spin Coating Thickness Calculator
Estimate thin film thickness from spin speed, viscosity, and concentration using the Meyerhofer model
Input Parameters
⚡ Auto-Update
RPM
±
Spin speed must be greater than zero
Viscosity must be greater than zero
Concentration must be between 0 and 100%
Exponent must be between 0.3 and 1.0
Typical range: 50–150. Calibrate with known samples.
Constant k must be greater than zero
relative
h ∝ e^(1/3). Higher evaporation yields thicker films.
Evaporation rate must be > 0
Results
Film Thickness (h)
—
nm
Equivalent:
—
Tip: Calibrate k using ellipsometry or profilometry on test films.
Understanding Spin Coating
Spin coating deposits uniform thin films of photoresists and polymers. Thickness scales inversely with spin speed and directly with concentration and viscosity.
Key: h ∝ ω⁻ᵅ. Doubling spin speed reduces thickness by ~30-40%.
Meyerhofer Model
Extends Emslie's model to include evaporation: h ∝ c₀·η^(1/3)·e^(1/3)·ω^(-2/3)
Limitation: Assumes Newtonian behavior. High-viscosity solutions (>5000 cP) may exhibit shear-thinning.
References
Meyerhofer, D. (1978). J. Appl. Phys., 49(7), 3993–3997.
Emslie, A. G. et al. (1958). J. Appl. Phys., 29(5), 858–862.
Hall, D. B. et al. (1998). Polym. Eng. Sci., 38(12), 2039–2045.
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