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New Pegasus300 Sold to Leading French Research Institute for CMOS Packaging

SPP Process Technology Systems and its parent company Sumitomo Precision Products Co, leaders in plasma process technologies for manufacturing micro-electro mechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold their 300mm-compatible DRIE production tool to CEA-LETI in France.

Dec 11th, 2009

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