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Picosun's New Picoflow Diffusion Enhancer Expands the Borders of ALD

Picosun Oy, Finnish, globally operating manufacturer of top-quality Atomic Layer Deposition (ALD) systems reports excellent deposition results with its new Picoflow diffusion enhancer feature. At customer sites in Asia and Europe, ultra-high conformality and uniformity ALD metal oxide thin films were deposited on extremely challenging high aspect ratio trenches on silicon wafers and complicated microchannel structures on silicon chip.

Aug 31st, 2012

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