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In recent years the analysis of increasingly smaller structures in the scanning electron microscope (SEM) has become more important than ever. While SEMs have been able to resolve nanometer-sized features and produce according images for decades already, the issue is far more difficult for elemental... more
Now, direct observation and measurement of micro and nano fibers is faster, better and easier than ever before. With the Fibermetric system powered by Phenom you can load and image samples in about 30 seconds. Magnifications up to 24,000 times produce accurate information on a large range of fibers as... more
Electrochemical (EC) technologies attract constantly rising interest because it is the way for controlled modifications of the surface even with atomic precision. EC deposition is a widely used approach for creation of thin metal films with unique properties. On the other hand EC dissolution allows imitation... more
Cost-effective utilization of expensive factory floor
area has been addressed by the development of
compact ALD batch tool for high throughput
processing of substrates. SUNALE™ Picobatch
ALD tool was used for handling 25 pcs. of 4" Si
wafers in a batch. Al2O3 thin films were grown at
300 °C... more
A semi-automatic loader was integrated to a
stand-alone SUNALE TM ALD reactor. Picoloader TM
Semipro system comprises of a load lock, a
pneumatic gate valve with a SEMI/MESC standard
flange, a substrate moving mechanism, and an
electronic motion controller. Vertical motion of
the substrate is carried... more
