The two invited papers include an overview on FDSOI (the alternative to bulk technologies for 20nm nodes and below) and an overview of new-generation substrates enabling future devices in the More Moore and More Than Moore topics.
A paper on the latest results in the integration of the metallic dual gate on FDSOI technology, with UTBOX, clearly positions Leti on the sub-16nm CMOS technologies.
Leti will present two papers on memory, including one on the impact of N-doping in GeTe to boost the data-retention performances of phase-change memory (PCM), and an in-depth study on the role of defects in the Al2O3 blocking layer for charge-trapped memories.
Leti also will present findings of a futuristic study on the mobility of carriers in 10nm silicon nanowires for tomorrow's CMOS (end of ITRS roadmap), and the latest results of its 3D through-silicon-via integration.
Two additional papers include results from Leti's work on the reliability of oxide gate based on high-k dielectrics doped with Lanthanum, and CMOS ICs on SiGe on insulator and silicon constrain (co-integration into CMOS SRAM cell on FDSOI).
CEA is a French research and technology public organisation, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC campus, CEA-Leti operates 8,000-mē state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, CEA-Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, CEA-Leti puts a strong emphasis on intellectual property and owns more than 1,500 patent families. For more information about Leti, please visit www.leti.fr.
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